Micro-Structured Pads for Chemical-Mechanical Polishing Fabricated by Photopolymerization Additive Manufacturing
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Dong Geun | ko |
| dc.contributor.author | Kim, Sanha | ko |
| dc.date.accessioned | 2024-01-03T01:03:12Z | - |
| dc.date.available | 2024-01-03T01:03:12Z | - |
| dc.date.created | 2023-12-29 | - |
| dc.date.issued | 2023-04-05 | - |
| dc.identifier.citation | 3rd Korea-Tribology International Symposium, K-TRIB2023 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/317250 | - |
| dc.language | English | - |
| dc.publisher | Korean Tribology Society | - |
| dc.title | Micro-Structured Pads for Chemical-Mechanical Polishing Fabricated by Photopolymerization Additive Manufacturing | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 3rd Korea-Tribology International Symposium, K-TRIB2023 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | BEXCO, Busan | - |
| dc.contributor.localauthor | Kim, Sanha | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.