Design and optimization of a novel compact and longrange 3-DOF flexure stage

Abstract

A novel compact and long-range 3-DOF flexure stage using three piezo-actuators is designed and optimized. The stage is the combination mechanism which composed of serial type X-stage and parallel type Y, θz; -stage. Stage consists of bridge-type amplifying mechanism for amplification of PZT deformation, double compound guide mechanisms for performing only desired motion, and circular hinge mechanism which permit rotational motion in Y, θz-stage. To set the design variables of stage, optimal design is carried out. To verify the results of optimal design, FEM simulation is used. The stage is designed to simultaneously attain 800μm in X and Y directions and ±5mrad in θz direction. 1st natural frequency of the X-stage is 45Hz and the Y, -stage is 89Hz. Size of the stage is 200× 200 mm2.