CMUT Humidity Sensor with a Calcium-Modified Silk Functionalized Layer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Taemin | ko |
| dc.contributor.author | Lee, Sangmok | ko |
| dc.contributor.author | Lee, Hyunjoo Jenny | ko |
| dc.date.accessioned | 2023-12-06T02:02:37Z | - |
| dc.date.available | 2023-12-06T02:02:37Z | - |
| dc.date.created | 2023-11-28 | - |
| dc.date.issued | 2023-03-07 | - |
| dc.identifier.citation | 7th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2023 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/315798 | - |
| dc.description.abstract | We propose a novel humidity measurement system that applies calcium (Ca)-modified silk to the Capacitive Micromachined Ultrasonic Transducer (CMUT) membrane. Due to Ca ions serving as water-capturing points, the Ca-modified silk film absorbs water molecules from the environment. By functionalizing the CMUT membrane with silk, a resonant frequency shift occurs with the change of the relative humidity (RH), and the developed CMUT sensor successfully measured the relative humidity with high sensitivity. | - |
| dc.language | English | - |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
| dc.title | CMUT Humidity Sensor with a Calcium-Modified Silk Functionalized Layer | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 7th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2023 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | COEX, Seoul | - |
| dc.identifier.doi | 10.1109/EDTM55494.2023.10103012 | - |
| dc.contributor.localauthor | Lee, Hyunjoo Jenny | - |
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