Programmable MZI based on a silicon photonic MEMS-tunable delay line

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 37
  • Download : 0
We report on a scalable and programmable integrated Mach–Zehnder interferometer (MZI) with a tunable free spectral range (FSR) and extinction ratio (ER). For the tunable path of the MZI, we designed and utilized a tunable delay line having high flexibility based on silicon photonic microelectromechanical systems (MEMS). By utilizing MEMS, the length of the delay line can be geometrically modified. In this way, there is no optical loss penalty other than the waveguide propagation loss as the number of tunable steps increases. Therefore, our device is more scalable in terms of optical loss than the previous approaches based on cascaded MZIs. In addition, the tuning energy required to reconfigure the length is only 8.46 pJ.
Publisher
Optica Publishing Group
Issue Date
2023-10
Language
English
Article Type
Article
Citation

OPTICS LETTERS, v.48, no.21, pp.5611 - 5614

ISSN
0146-9592
DOI
10.1364/OL.494414
URI
http://hdl.handle.net/10203/315209
Appears in Collection
EE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0