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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Al Doped HfO2 Layer Fabrication For FeFET

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dc.contributor.authorSung, Sanghyeonko
dc.contributor.authorKim, Kyung Baeko
dc.contributor.authorLee, Keon Jaeko
dc.date.accessioned2023-11-21T09:04:39Z-
dc.date.available2023-11-21T09:04:39Z-
dc.date.created2023-11-21-
dc.date.issued2023-06-08-
dc.identifier.citationGlobal Conference on Innovation Materials 2023-
dc.identifier.urihttp://hdl.handle.net/10203/314979-
dc.languageEnglish-
dc.publisherThe Materials Research Society of Korea-
dc.titleAl Doped HfO2 Layer Fabrication For FeFET-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameGlobal Conference on Innovation Materials 2023-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocationJEJU ICC-
dc.contributor.localauthorLee, Keon Jae-
dc.contributor.nonIdAuthorKim, Kyung Bae-
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MS-Conference Papers(학술회의논문)
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