DC Field | Value | Language |
---|---|---|
dc.contributor.author | Song, Tae-Eun | ko |
dc.contributor.author | Oh, Sang-Ah | ko |
dc.contributor.author | Ahn, Chi Won | ko |
dc.contributor.author | Oh, Il-Kwon | ko |
dc.contributor.author | Jeon, Hwan-Jin | ko |
dc.date.accessioned | 2023-11-21T01:00:53Z | - |
dc.date.available | 2023-11-21T01:00:53Z | - |
dc.date.created | 2023-11-20 | - |
dc.date.issued | 2023-10 | - |
dc.identifier.citation | LANGMUIR, v.39, no.44, pp.15785 - 15791 | - |
dc.identifier.issn | 0743-7463 | - |
dc.identifier.uri | http://hdl.handle.net/10203/314898 | - |
dc.description.abstract | Developing a new master mold-based patterning technology that can be used to accurately, precisely, and uniformly create large-area micropatterns while controlling the micropatterns of curved structures is essential for promoting innovative developments in various application fields. This study develops a new top-down lithographic process that can effectively produce structural patterns with high curvatures by growing isolated microbubbles in the master pattern holes. The isolated air-pocket lithography (IAL) we developed is based on the controlled behavior of micrometer-sized air pockets trapped between the grooves of the master pattern and the curable polymer. We successfully fabricated a concave array polydimethylsiloxane (PDMS) film and a convex array polymer film. In addition, the IAL mechanism was proven by confirming the expansion process of micrometer-sized air pockets trapped between the deep groove of the silicon master pattern and the PDMS coating film by using optical microscopy images. We successfully obtained complex three-dimensional structural patterns containing both 3D hollow spherical concave and ring-shaped two-dimensional convex patterns. This simple, fast, and effective high-curvature patterning technique is expected to provide innovative solutions for future applications such as nanoelectronics, optical devices, displays, and photovoltaics. | - |
dc.language | English | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.title | Effective Approach for Fabricating Highly Precise High-Curvature Structural Patterns via Air-Bubble Induction | - |
dc.type | Article | - |
dc.identifier.wosid | 001092761100001 | - |
dc.identifier.scopusid | 2-s2.0-85176496405 | - |
dc.type.rims | ART | - |
dc.citation.volume | 39 | - |
dc.citation.issue | 44 | - |
dc.citation.beginningpage | 15785 | - |
dc.citation.endingpage | 15791 | - |
dc.citation.publicationname | LANGMUIR | - |
dc.identifier.doi | 10.1021/acs.langmuir.3c02454 | - |
dc.contributor.localauthor | Oh, Il-Kwon | - |
dc.contributor.nonIdAuthor | Song, Tae-Eun | - |
dc.contributor.nonIdAuthor | Oh, Sang-Ah | - |
dc.contributor.nonIdAuthor | Ahn, Chi Won | - |
dc.contributor.nonIdAuthor | Jeon, Hwan-Jin | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | COLLOIDAL LITHOGRAPHY | - |
dc.subject.keywordPlus | MICROLENS ARRAY | - |
dc.subject.keywordPlus | THERMAL REFLOW | - |
dc.subject.keywordPlus | NANOFABRICATION | - |
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