Simulation-based ‘smart’ operation management system for semiconductor manufacturing
Presented in this paper is a framework of a simulation-based ‘smart’ operation management system (OMS) for semiconductor manufacturing. Also described are changes in the semiconductor market environment and key modules in the smart OMS. The proposed smart OMS is being implemented for a couple of IC chip makers in Korea.
- Publisher
- Springer New York LLC
- Issue Date
- 2015-09
- Language
- English
- Citation
IFIP WG 5.7 International Conference on Advances in Production Management Systems, APMS 2015, pp.82 - 89
- ISSN
- 1868-4238
- Appears in Collection
- IE-Conference Papers(학술회의논문)
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