Development of AMOLED TFT crystallization system using an excimer laser and XY stage

Abstract

This paper presents the development of an AMOLED TFT crystallization system using an excimer laser and a XY linear motor stage. The system consists of a laser optics part and a stage part. The laser optics part includes 5 parts; excimer laser, beam expanding module, homogenizer module, field lens module and projection lens module. To manufacture uniformly, homogeneous illumination by the laser beam is required. Final dimension of laser beam is 370 × 0.4 mm(X,Y). Homogeneities of beam are 2.26%(X), 2.66%(Y). The stage controls the location of the specimen. The stage consists of a linear motor and an air bearing. The size of the stage is 1750 ×1000 × 1000 mm<sup>3</sup> and the size of moving plate is 650 × 650 × 100mm<sup>3</sup>. Also, specimen size is 650 × 650 mm<sup>2</sup>. To manufacture a whole specimen the stage travels forwards and backwards.