Reversible nano-lithography between materials

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 37
  • Download : 0
The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro- or nano-scale sensors and actuators.
Publisher
Institute of Electrical and Electronics Engineers Inc.
Issue Date
2014-04
Language
English
Citation

9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, pp.549 - 550

ISSN
2474-3747
DOI
10.1109/NEMS.2014.6908871
URI
http://hdl.handle.net/10203/313801
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0