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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Double-channel oxide semiconductor Vertical TFTs with mo source/drain layer

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dc.contributor.authorHwang, Chi-Sunko
dc.contributor.authorChoi, Ji Hunko
dc.contributor.authorCho, Sung Haengko
dc.contributor.authorYang, Jong-Heonko
dc.contributor.authorPi, Jae-Eunko
dc.contributor.authorKwon, Oh-Sangko
dc.contributor.authorPark, Eun-Sukko
dc.contributor.authorKim, Hee-Okko
dc.contributor.authorPark, Sang-Hee Koko
dc.date.accessioned2023-10-20T03:00:21Z-
dc.date.available2023-10-20T03:00:21Z-
dc.date.created2023-10-20-
dc.date.issued2016-12-
dc.identifier.citation23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016, pp.785 - 787-
dc.identifier.urihttp://hdl.handle.net/10203/313594-
dc.description.abstractVertical channel oxide semiconductor TFT was fabricated with convention metal source/drain layer, sputtered active layer and PECVD deposited gate insulator. Double<hannel active structure was adopted for preventing non-ohmic contact resistance between active layer and metal source/drain layer. This structure is desirable for applying VTFTs to display panel with large area.-
dc.languageEnglish-
dc.publisherSociety for Information Display-
dc.titleDouble-channel oxide semiconductor Vertical TFTs with mo source/drain layer-
dc.typeConference-
dc.identifier.scopusid2-s2.0-85050502223-
dc.type.rimsCONF-
dc.citation.beginningpage785-
dc.citation.endingpage787-
dc.citation.publicationname23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016-
dc.identifier.conferencecountryJA-
dc.identifier.conferencelocationFukuoka-
dc.contributor.localauthorPark, Sang-Hee Ko-
dc.contributor.nonIdAuthorHwang, Chi-Sun-
dc.contributor.nonIdAuthorChoi, Ji Hun-
dc.contributor.nonIdAuthorCho, Sung Haeng-
dc.contributor.nonIdAuthorYang, Jong-Heon-
dc.contributor.nonIdAuthorPi, Jae-Eun-
dc.contributor.nonIdAuthorKwon, Oh-Sang-
dc.contributor.nonIdAuthorPark, Eun-Suk-
dc.contributor.nonIdAuthorKim, Hee-Ok-
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MS-Conference Papers(학술회의논문)
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