Design of a novel fine stage actuated by voice coil motor

Abstract

Fine stage has been researched for many years and developed in diverse forms. In this paper, design of a novel fine stage actuated by voice coil motors is presented. The fine stage uses voice coil motors as actuators. Total eight voice coil motors are used for actuating six-degree-of-freedom motions: four of them for in-plane motions and four of them for out-of-plane motions. Guiding mechanisms are flexures which support mass of the mover of the fine stage. The force equation of the voice coil motor can be expressed with current, intensity of magnetic field, and etc. The design variables in the force equation were categorized. After mathematical modelling of the equations, design variables were optimized by mathematical programming. After design variables were derived by the optimization, final 3D geometrical model of the fine stage was virtually made and assembled by computer program. Modal analysis was simulated for finding modal frequencies.