DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yun, Jeonghoon | ko |
dc.contributor.author | Ahn, Jae-Huyk | ko |
dc.contributor.author | Choi, Yang-Kyu | ko |
dc.contributor.author | Park, Inkyu | ko |
dc.date.accessioned | 2023-08-31T07:02:40Z | - |
dc.date.available | 2023-08-31T07:02:40Z | - |
dc.date.created | 2023-06-08 | - |
dc.date.issued | 2017-01 | - |
dc.identifier.citation | 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, pp.1079 - 1082 | - |
dc.identifier.issn | 1084-6999 | - |
dc.identifier.uri | http://hdl.handle.net/10203/312069 | - |
dc.description.abstract | This paper reports silicon nanowire sensor decorated with palladium nanoparticles for the low temperature hydrogen detection with self-heating for fast response and recovery. Hydrogen gas responses of the palladium coated silicon nanowire (Pd-SiNW) were measured with Joule heating of Pd-SiNW. Even though the Pd-SiNW can detect hydrogen gas at room temperature, transient response is slow and even slower in humid conditions. Self-heating of the Pd-SiNW reduces the response and recovery times by consuming low power without any significant change of sensitivity. Power consumption is further reduced to sub-100 mu W by suspending the Pd-SiNW from substrate. Humidity effect on hydrogen sensing was also reduced by Joule heating. Joule heated Pd-SiNW device is a promising hydrogen gas sensor to apply mobile device. | - |
dc.language | English | - |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
dc.title | Ultra-low power hydrogen sensor by suspended and palladium coated silicon nanowire | - |
dc.type | Conference | - |
dc.identifier.wosid | 000402552000277 | - |
dc.identifier.scopusid | 2-s2.0-85015802095 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 1079 | - |
dc.citation.endingpage | 1082 | - |
dc.citation.publicationname | 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | Las Vegas, NV | - |
dc.identifier.doi | 10.1109/MEMSYS.2017.7863600 | - |
dc.contributor.localauthor | Park, Inkyu | - |
dc.contributor.nonIdAuthor | Yun, Jeonghoon | - |
dc.contributor.nonIdAuthor | Ahn, Jae-Huyk | - |
dc.contributor.nonIdAuthor | Choi, Yang-Kyu | - |
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