Ultra-low power hydrogen sensor by suspended and palladium coated silicon nanowire

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dc.contributor.authorYun, Jeonghoonko
dc.contributor.authorAhn, Jae-Huykko
dc.contributor.authorChoi, Yang-Kyuko
dc.contributor.authorPark, Inkyuko
dc.date.accessioned2023-08-31T07:02:40Z-
dc.date.available2023-08-31T07:02:40Z-
dc.date.created2023-06-08-
dc.date.issued2017-01-
dc.identifier.citation30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, pp.1079 - 1082-
dc.identifier.issn1084-6999-
dc.identifier.urihttp://hdl.handle.net/10203/312069-
dc.description.abstractThis paper reports silicon nanowire sensor decorated with palladium nanoparticles for the low temperature hydrogen detection with self-heating for fast response and recovery. Hydrogen gas responses of the palladium coated silicon nanowire (Pd-SiNW) were measured with Joule heating of Pd-SiNW. Even though the Pd-SiNW can detect hydrogen gas at room temperature, transient response is slow and even slower in humid conditions. Self-heating of the Pd-SiNW reduces the response and recovery times by consuming low power without any significant change of sensitivity. Power consumption is further reduced to sub-100 mu W by suspending the Pd-SiNW from substrate. Humidity effect on hydrogen sensing was also reduced by Joule heating. Joule heated Pd-SiNW device is a promising hydrogen gas sensor to apply mobile device.-
dc.languageEnglish-
dc.publisherInstitute of Electrical and Electronics Engineers Inc.-
dc.titleUltra-low power hydrogen sensor by suspended and palladium coated silicon nanowire-
dc.typeConference-
dc.identifier.wosid000402552000277-
dc.identifier.scopusid2-s2.0-85015802095-
dc.type.rimsCONF-
dc.citation.beginningpage1079-
dc.citation.endingpage1082-
dc.citation.publicationname30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationLas Vegas, NV-
dc.identifier.doi10.1109/MEMSYS.2017.7863600-
dc.contributor.localauthorPark, Inkyu-
dc.contributor.nonIdAuthorYun, Jeonghoon-
dc.contributor.nonIdAuthorAhn, Jae-Huyk-
dc.contributor.nonIdAuthorChoi, Yang-Kyu-
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ME-Conference Papers(학술회의논문)
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