DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Yong-Hoon | ko |
dc.contributor.author | Jin, Yun Su | ko |
dc.contributor.author | Kim, Chang-Keun | ko |
dc.contributor.author | Hong, Songcheol | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.date.accessioned | 2023-08-28T08:01:37Z | - |
dc.date.available | 2023-08-28T08:01:37Z | - |
dc.date.created | 2023-07-06 | - |
dc.date.issued | 2017-06 | - |
dc.identifier.citation | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, pp.906 - 909 | - |
dc.identifier.uri | http://hdl.handle.net/10203/311905 | - |
dc.description.abstract | This paper reports a unique 4-terminal MEMS relay (actuation is electrically isolated with signal passage) employing a novel one-contact design to overcome high contact resistance problem of the conventional 4-terminal MEMS relay which utilizes a typical two-contact design. The fabricated 4-terminal MEMS relay with the one-contact design demonstrated a contact resistance of 18 mΩ, which is two order-of-magnitude lower value than that of the conventional two-contact design. To the best of our knowledge, this result is the lowest value in the 4-terminal MEMS relay and comparable value with the state-of-the-art in 3-terminal MEMS relay [14]. In addition, the relay was operated up to 1.1 × 106 cycles at 1 V / 50 mA in an air and hot switching condition with negligible contact resistance variation. The lifetime is 10 times longer than that of the conventional 4-terminal MEMS relay. | - |
dc.language | English | - |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
dc.title | 4-Terminal MEMS relay with an extremely low contact resistance employing a novel one-contact design | - |
dc.type | Conference | - |
dc.identifier.wosid | 000426701400224 | - |
dc.identifier.scopusid | 2-s2.0-85029354585 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 906 | - |
dc.citation.endingpage | 909 | - |
dc.citation.publicationname | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 | - |
dc.identifier.conferencecountry | CH | - |
dc.identifier.conferencelocation | Kaohsiung | - |
dc.identifier.doi | 10.1109/TRANSDUCERS.2017.7994196 | - |
dc.contributor.localauthor | Hong, Songcheol | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Yoon, Yong-Hoon | - |
dc.contributor.nonIdAuthor | Kim, Chang-Keun | - |
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