Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation

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dc.contributor.authorSattari, Hamedko
dc.contributor.authorGraziosi, Teodoroko
dc.contributor.authorKiss, Marcellko
dc.contributor.authorSeok, Tae Joonko
dc.contributor.authorHan, Sangyoonko
dc.contributor.authorWu, Ming Cko
dc.contributor.authorQuack, Nielsko
dc.date.accessioned2023-08-17T11:00:27Z-
dc.date.available2023-08-17T11:00:27Z-
dc.date.created2023-07-06-
dc.date.issued2017-08-
dc.identifier.citation22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017-
dc.identifier.issn2160-5033-
dc.identifier.urihttp://hdl.handle.net/10203/311652-
dc.description.abstractWe present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB.-
dc.languageEnglish-
dc.publisherIEEE Computer Society-
dc.titleAnalog silicon photonic MEMS phase-shifter with double-step electrostatic actuation-
dc.typeConference-
dc.identifier.wosid000426984000001-
dc.identifier.scopusid2-s2.0-85035003968-
dc.type.rimsCONF-
dc.citation.publicationname22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationSanta Fe-
dc.identifier.doi10.1109/OMN.2017.8051437-
dc.contributor.localauthorHan, Sangyoon-
dc.contributor.nonIdAuthorSattari, Hamed-
dc.contributor.nonIdAuthorGraziosi, Teodoro-
dc.contributor.nonIdAuthorKiss, Marcell-
dc.contributor.nonIdAuthorSeok, Tae Joon-
dc.contributor.nonIdAuthorWu, Ming C-
dc.contributor.nonIdAuthorQuack, Niels-
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