DC Field | Value | Language |
---|---|---|
dc.contributor.author | Sattari, Hamed | ko |
dc.contributor.author | Graziosi, Teodoro | ko |
dc.contributor.author | Kiss, Marcell | ko |
dc.contributor.author | Seok, Tae Joon | ko |
dc.contributor.author | Han, Sangyoon | ko |
dc.contributor.author | Wu, Ming C | ko |
dc.contributor.author | Quack, Niels | ko |
dc.date.accessioned | 2023-08-17T11:00:27Z | - |
dc.date.available | 2023-08-17T11:00:27Z | - |
dc.date.created | 2023-07-06 | - |
dc.date.issued | 2017-08 | - |
dc.identifier.citation | 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 | - |
dc.identifier.issn | 2160-5033 | - |
dc.identifier.uri | http://hdl.handle.net/10203/311652 | - |
dc.description.abstract | We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB. | - |
dc.language | English | - |
dc.publisher | IEEE Computer Society | - |
dc.title | Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation | - |
dc.type | Conference | - |
dc.identifier.wosid | 000426984000001 | - |
dc.identifier.scopusid | 2-s2.0-85035003968 | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | Santa Fe | - |
dc.identifier.doi | 10.1109/OMN.2017.8051437 | - |
dc.contributor.localauthor | Han, Sangyoon | - |
dc.contributor.nonIdAuthor | Sattari, Hamed | - |
dc.contributor.nonIdAuthor | Graziosi, Teodoro | - |
dc.contributor.nonIdAuthor | Kiss, Marcell | - |
dc.contributor.nonIdAuthor | Seok, Tae Joon | - |
dc.contributor.nonIdAuthor | Wu, Ming C | - |
dc.contributor.nonIdAuthor | Quack, Niels | - |
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