Palladium nanoparticle embedded silicon nanowire field-effect transistor with oscillation characteristics for hydrogen detection

Abstract

Oscillatory behavior of silicon nanowire which has a floating body is feasible by single transistor latch (STL) phenomenon. Palladium nanoparticles are embedded into the silicon nanowire to implement function of detecting hydrogen gas. The mechanism of oscillation frequency changes is studied and verified by analyzing measurement results. By evaluating and oscillation frequency changes and various performances, the hydrogen sensor as a new sensing metric is proposed. hydrogen sensor based on oscillatory behavior of silicon nanowire can significantly reduce power consumption, area. These features are suitable for internet of things (IoT) devices.