Fabrication of micro gas preconcentrator with ordered 3D porous nanostructure

Abstract

As the need for rapid real-time detection and analysis of harmful substances increases, the importance of portable gas chromatography technology has emerged and many related studies have been conducted. In particular, as the gas chromatography system has become smaller, the role of a micro gas preconcentrator capable of concentrating a sample to be analyzed in a sufficient amount and sending it to a separator column has increased. However, in previous studies, it has been difficult to form a nanostructure that simultaneously satisfies the low pressure drop in the micro preconcentrator that enables smooth flow and specific high surface area. In this study, an ordered three-dimensional (3D) porous nanostructure embedded in the micro preconcentrator was fabricated using proximity-field nanopatterning. The uniform porous 3D nanostructure has a height of up to 25 μm and significantly improves the preconcentration factor of benzene, toluene and xylene through polymer coating on the surface. This study is expected to be the cornerstone of a super-miniaturized preconcentrator research in the future beyond the range of the size of existing micro preconcentrators.