학위논문(석사) - 한국과학기술원 : 신소재공학과, 2023.2,[iv, 44 p. :]
copper interconnect▼adiffusion barrier▼ascreening▼atransition metal dichalcogenides▼atitanium disulfide; 구리배선▼a확산베리어▼a스크리닝▼a전이금속디칼코제나이드▼a이황화타이타늄
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.