DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Park, Sang-Hee | - |
dc.contributor.advisor | 박상희 | - |
dc.contributor.author | Kim, Jin-Gyu | - |
dc.date.accessioned | 2023-06-22T19:34:00Z | - |
dc.date.available | 2023-06-22T19:34:00Z | - |
dc.date.issued | 2023 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=1030485&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/308597 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2023.2,[x, 110 p. :] | - |
dc.description.abstract | As interest in personal health care increases, various biosensor products for health care are emerging along with healthy food. Although these biosensors are being continuously studied for wearable platforms to improve convenience and form factor, it is essential to secure stability and high sensitivity to the external environment to improve the marketability of flexible biosensors. In this study, a mono-layer silicon nitride based thin film encapsulation with excellent moisture barrier properties and long-term stability was developed by increasing the amount of Si-N bonding through an optimized plasma-enhanced chemical vapor deposition with the addition of hydrogen gas. In addition, high sensitivity was obtained by introducing a dual gate structure causing capacitive coupling effect to the oxide thin-film transistor, and excellent performance was confirmed by applying it to a biosensor for detecting COVID-19. Furthermore, the application of the biosensor as a flexible device was investigated by introducing it into a flexible platform. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 박막 봉지▼a플라즈마 강화 화학증착법▼a수분 배리어 특성▼a바이오센서▼a산화물 박막 트랜지스터▼a유연 소자 | - |
dc.subject | Thin film encapsulation▼aPlasma-enhanced chemical vapor deposition▼aWater vapor transmission rate▼aBiosensor▼aOxide thin-film transistor▼aFlexible device | - |
dc.title | (A) study on thin film encapsulation and transistor-based biosensor for the high performance flexible device | - |
dc.title.alternative | 고성능 유연 소자를 위한 박막 봉지 및 트랜지스터 기반 바이오센서 연구 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :신소재공학과, | - |
dc.contributor.alternativeauthor | 김진규 | - |
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