DC Field | Value | Language |
---|---|---|
dc.contributor.author | Liu, Xiyuan | ko |
dc.contributor.author | Whalen, Andrew J. | ko |
dc.contributor.author | Ryu, Sang Baek | ko |
dc.contributor.author | Lee, Seungwoo | ko |
dc.contributor.author | Fried, Shelley I. | ko |
dc.contributor.author | Kim, Kayeon | ko |
dc.contributor.author | Cai, Changsi | ko |
dc.contributor.author | Lauritzen, Martin | ko |
dc.contributor.author | Bertram, Nicolas | ko |
dc.contributor.author | Chang, Bingdong | ko |
dc.contributor.author | Yu, Tianbo | ko |
dc.contributor.author | Han, Anpan | ko |
dc.date.accessioned | 2023-03-13T07:00:09Z | - |
dc.date.available | 2023-03-13T07:00:09Z | - |
dc.date.created | 2023-03-11 | - |
dc.date.created | 2023-03-11 | - |
dc.date.issued | 2023-05 | - |
dc.identifier.citation | BIOSENSORS & BIOELECTRONICS, v.227 | - |
dc.identifier.issn | 0956-5663 | - |
dc.identifier.uri | http://hdl.handle.net/10203/305591 | - |
dc.description.abstract | Micro-coil magnetic stimulation of brain tissue presents new challenges for MEMS micro-coil probe fabrication. The main challenges are threefold; (i) low coil resistance for high power efficiency, (ii) low leak current from the probe into the in vitro experimental set-up, (iii) adaptive MEMS process technology because of the dynamic research area, which requires agile design changes. Taking on these challenges, we present a MEMS fabrication process that has three main features; (i) multilayer resist lift-off process to pattern up to 1800-nm-thick metal films, and special care is taken to obtain high conductivity thin-films by physical vapor deposition, and (ii) all micro-coil Al wires are encapsulated in at least 200 nm of ALD alumina and 6-μm-thick parylene C such the leak resistance is high (>210 GΩ), (iii) combining a multi-step DRIE process and maskless photolithography for adaptive design and device fabrication. The entire process requires four lithography steps. Because we avoided SOI wafers and lithography mask fabrication, the design-to-device time is shortened significantly. The resulting probes are 4-mm-long, 60-μm-thick, and down to 150 μm-wide. Selected MEMS coil devices were validated in vivo using mice and compared to previous work. | - |
dc.language | English | - |
dc.publisher | ELSEVIER ADVANCED TECHNOLOGY | - |
dc.title | MEMS micro-coils for magnetic neurostimulation | - |
dc.type | Article | - |
dc.identifier.wosid | 000943150300001 | - |
dc.identifier.scopusid | 2-s2.0-85148547620 | - |
dc.type.rims | ART | - |
dc.citation.volume | 227 | - |
dc.citation.publicationname | BIOSENSORS & BIOELECTRONICS | - |
dc.identifier.doi | 10.1016/j.bios.2023.115143 | - |
dc.contributor.localauthor | Lee, Seungwoo | - |
dc.contributor.nonIdAuthor | Liu, Xiyuan | - |
dc.contributor.nonIdAuthor | Whalen, Andrew J. | - |
dc.contributor.nonIdAuthor | Ryu, Sang Baek | - |
dc.contributor.nonIdAuthor | Fried, Shelley I. | - |
dc.contributor.nonIdAuthor | Kim, Kayeon | - |
dc.contributor.nonIdAuthor | Cai, Changsi | - |
dc.contributor.nonIdAuthor | Lauritzen, Martin | - |
dc.contributor.nonIdAuthor | Bertram, Nicolas | - |
dc.contributor.nonIdAuthor | Chang, Bingdong | - |
dc.contributor.nonIdAuthor | Yu, Tianbo | - |
dc.contributor.nonIdAuthor | Han, Anpan | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Neurotechnologies | - |
dc.subject.keywordAuthor | Brain machine interfaces | - |
dc.subject.keywordAuthor | Neurochip | - |
dc.subject.keywordAuthor | MEMS micro-coils | - |
dc.subject.keywordAuthor | Micro magnetic stimulation | - |
dc.subject.keywordAuthor | Neuroprobes | - |
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