DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ko, Juhee | ko |
dc.contributor.author | Fredj, Nada | ko |
dc.contributor.author | Adhawiyah, Rafita Erli | ko |
dc.contributor.author | Lee, Jungchul | ko |
dc.date.accessioned | 2023-02-21T01:00:11Z | - |
dc.date.available | 2023-02-21T01:00:11Z | - |
dc.date.created | 2023-02-20 | - |
dc.date.created | 2023-02-20 | - |
dc.date.issued | 2023-02 | - |
dc.identifier.citation | JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.37, no.2, pp.887 - 900 | - |
dc.identifier.issn | 1738-494X | - |
dc.identifier.uri | http://hdl.handle.net/10203/305309 | - |
dc.description.abstract | As the requirements of micro-/nano printing technologies are continuously increasing, direct writing technologies on a submicron scale are drawing attention. One of the promising methods is a nozzle-based precision patterning with atomic force microscopy (AFM), which has the advantages of high position controllability including nozzle-to-substrate distance feedback under a nanometer scale. It uses a fluidic channel and a dispensing nozzle integrated with a cantilever structure for deflection monitoring. In this paper, we introduce micro/nanofluidics integrated cantilevers for nozzle-based precision patterning in several considerations: 1) numerous fabrication strategies for nozzle-integrated fluidic cantilevers; 2) methods for liquid transport; 3) methods for pattern formation; and 4) applications with various printing materials. | - |
dc.language | English | - |
dc.publisher | KOREAN SOC MECHANICAL ENGINEERS | - |
dc.title | Nozzle-based precision patterning with micro-/nano fluidics integrated cantilevers | - |
dc.type | Article | - |
dc.identifier.wosid | 000920980900002 | - |
dc.identifier.scopusid | 2-s2.0-85146933392 | - |
dc.type.rims | ART | - |
dc.citation.volume | 37 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 887 | - |
dc.citation.endingpage | 900 | - |
dc.citation.publicationname | JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY | - |
dc.identifier.doi | 10.1007/s12206-023-0130-5 | - |
dc.identifier.kciid | ART002929165 | - |
dc.contributor.localauthor | Lee, Jungchul | - |
dc.contributor.nonIdAuthor | Fredj, Nada | - |
dc.contributor.nonIdAuthor | Adhawiyah, Rafita Erli | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Atomic force microscopy (AFM) | - |
dc.subject.keywordAuthor | Channel cantilever | - |
dc.subject.keywordAuthor | Dispensing | - |
dc.subject.keywordAuthor | Micro-patterning | - |
dc.subject.keywordAuthor | Nozzle | - |
dc.subject.keywordAuthor | Precision manufacturing | - |
dc.subject.keywordPlus | ATOMIC-FORCE MICROSCOPY | - |
dc.subject.keywordPlus | HOLLOW AFM CANTILEVER | - |
dc.subject.keywordPlus | FOUNTAIN PEN | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | PROBE | - |
dc.subject.keywordPlus | OPTIMIZATION | - |
dc.subject.keywordPlus | NANOPIPETTE | - |
dc.subject.keywordPlus | ASPIRATION | - |
dc.subject.keywordPlus | DELIVERY | - |
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