Hochempfindliche Wegmesseinrichtung unter Verwendung von linear variablen Differentialtransformatoren

Abstract

The present invention is intended to provide a ultra-precision high sensitivity displacement measuring device which has such a high resolution as to be able to make submicron measurement.According to the invention, there is provided a displacement measuring device with high resolution, comprising: an electromagnetic system (10) which forms a closed loop of magnetic blocks (17,19) and which houses primary coil bundles (11) and secondary coil bundles (13) for forming magnetic fields within said closed loop of magnetic blocks (17,19); plate springs (20) which include displacement input parts (21) and displacement output zones (24) fixed to the cores (14) having the secondary coils wound around them and which act to guide so that the displacement output zones (24) can output the displacement amplified in proportional to the displacement input to the displacement input parts (21); and a supporting mechanism (30) for supporting the displacement input parts (21) of said plate springs (20) so that the displacement may be input only in one axial direction.