Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment보조 장비 없이 타원 계측기의 입사각을 위한 타원 계측기와 정밀 자동 정렬 방법

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 136
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorGweon, Dae-Gabko
dc.contributor.authorPark, Sunglimko
dc.contributor.authorJeong, Jae Whako
dc.date.accessioned2022-12-16T03:01:00Z-
dc.date.available2022-12-16T03:01:00Z-
dc.identifier.urihttp://hdl.handle.net/10203/303099-
dc.description.abstractAn ellipsometer for aligning incident angle comprising: a main frame shaping half circle and flat surface on which a plurality of grooves are radial and circumferential directionally carved; a specimen stage, which is installed at the groove-caved surface of the main frame, for tilting a specimen on a upper surface of the specimen stage with respect to horizontal direction and translating the specimen upward and downward; a polarizing unit, which is capable of fixing and moving on the groove-carved surface of the main frame, for polarizing a light from a light source and outputting the polarized light to the specimen, and moving on the groove-carved surface; and a light detecting unit, which is capable of fixing and moving on the groove-carved surface, for a reflection light from the specimen.-
dc.titleEllipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment-
dc.title.alternative보조 장비 없이 타원 계측기의 입사각을 위한 타원 계측기와 정밀 자동 정렬 방법-
dc.typePatent-
dc.type.rimsPAT-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorJeong, Jae Wha-
dc.contributor.assigneeKAIST-
dc.identifier.iprsType특허-
dc.identifier.patentApplicationNumber10040372-
dc.identifier.patentRegistrationNumber06744510-
dc.date.application2002-01-09-
dc.date.registration2004-06-01-
dc.publisher.countryUS-
Appears in Collection
ME-Patent(특허)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0