DC Field | Value | Language |
---|---|---|
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.contributor.author | Park, Sunglim | ko |
dc.contributor.author | Jeong, Jae Wha | ko |
dc.date.accessioned | 2022-12-16T03:01:00Z | - |
dc.date.available | 2022-12-16T03:01:00Z | - |
dc.identifier.uri | http://hdl.handle.net/10203/303099 | - |
dc.description.abstract | An ellipsometer for aligning incident angle comprising: a main frame shaping half circle and flat surface on which a plurality of grooves are radial and circumferential directionally carved; a specimen stage, which is installed at the groove-caved surface of the main frame, for tilting a specimen on a upper surface of the specimen stage with respect to horizontal direction and translating the specimen upward and downward; a polarizing unit, which is capable of fixing and moving on the groove-carved surface of the main frame, for polarizing a light from a light source and outputting the polarized light to the specimen, and moving on the groove-carved surface; and a light detecting unit, which is capable of fixing and moving on the groove-carved surface, for a reflection light from the specimen. | - |
dc.title | Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment | - |
dc.title.alternative | 보조 장비 없이 타원 계측기의 입사각을 위한 타원 계측기와 정밀 자동 정렬 방법 | - |
dc.type | Patent | - |
dc.type.rims | PAT | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Jeong, Jae Wha | - |
dc.contributor.assignee | KAIST | - |
dc.identifier.iprsType | 특허 | - |
dc.identifier.patentApplicationNumber | 10040372 | - |
dc.identifier.patentRegistrationNumber | 06744510 | - |
dc.date.application | 2002-01-09 | - |
dc.date.registration | 2004-06-01 | - |
dc.publisher.country | US | - |
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