Apparatus for measuring 6-degree-of-freedom motions of rigid body by using three-facet mirror

Abstract

An apparatus for measuring six-degree-of-freedom motions by using three-facet reflector, the six-degree-of-freedom motions of an object being measured by using the laser beam proceeding from a laser light source, comprising: a multiple facet reflector in the form of a trigonal pyramid, the multiple facet reflector being fixed on the object for measurement and able to reflect the laser beam in three directions; three position-sensitive detectors for measuring the position and intensity of the laser light points formed on their surfaces, with the movement of the multiple facet reflector, and then providing output signals; and a controlling section for analyzing six-degree-of-freedom motions of the multiple facet reflector by using the position and intensity of the laser light points output from the three position-sensitive detectors. (FIG. 4).