DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Ho-Gi | ko |
dc.contributor.author | Lee, Won Jae | ko |
dc.contributor.author | Yoon, Soon Gil | ko |
dc.contributor.author | Ahn, Joon Hyung | ko |
dc.date.accessioned | 2022-12-14T09:00:42Z | - |
dc.date.available | 2022-12-14T09:00:42Z | - |
dc.identifier.uri | http://hdl.handle.net/10203/303009 | - |
dc.description.abstract | A method for forming SBT ferroelectric thin film. Sr(C.sub.5 F.sub.6 HO.sub.2).sub.2, Bi(C.sub.6 H.sub.5).sub.3 and Ta(C.sub.2 H.sub.5 O).sub.5 are used as the precursors of Sr, Bi and Ta and bubbled at a temperature of 110-130.degree. C., 140-160.degree. C., and 120-140.degree. C., respectively. The deposition of the precursors on a substrate is carried out at 500-550.degree. C. in plasma by using an RF power of 100-150 W. Having a residual polarity (Pr) of 15 .mu.C/cm.sup.2 or higher and a coercive electric field (Ec) of 50 kV/cm or less and, the SBT ferroelectric thin film does not show a fatigue phenomenon until 1.times.10.sup.11 cycles as measured under 6V bipolar square pulse in the structure comprising Pt upper and lower electrodes and thus, can be applied for non-volatile memory devices. | - |
dc.title | Method for forming SBT ferroelectric thin film | - |
dc.title.alternative | SBT강유전체 박막 형성 방법 | - |
dc.type | Patent | - |
dc.type.rims | PAT | - |
dc.contributor.localauthor | Kim, Ho-Gi | - |
dc.contributor.nonIdAuthor | Lee, Won Jae | - |
dc.contributor.nonIdAuthor | Yoon, Soon Gil | - |
dc.contributor.nonIdAuthor | Ahn, Joon Hyung | - |
dc.contributor.assignee | KAIST | - |
dc.identifier.iprsType | 특허 | - |
dc.identifier.patentApplicationNumber | 09128938 | - |
dc.identifier.patentRegistrationNumber | 06090455 | - |
dc.date.application | 1998-08-05 | - |
dc.date.registration | 2000-07-18 | - |
dc.publisher.country | US | - |
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