Surface emitting laser device with monolithically integrated monitor photodetector

Abstract

Disclosed is a surface emitting laser device with a monolithically integrated monitor photodetector, which is combined with an automatic power control circuit, thereby being capable of more accurately controlling the surface emitting laser output power. A method is also disclosed, which is adapted to fabricate the surface emitting laser device. In accordance with, the present invention, the surface emitting laser device includes insulating layers each sandwiched between an intrinsic semiconductor layer and a doped semiconductor layer in a monitor photodetector adapted to partially absorb light emitted from a surface emitting laser, thereby outputting a detect signal for the light. The insulating layers serve to remove photocurrent resulting from spontaneous emission light emitted from the surface emitting laser. By this configuration, it is possible to accurately control the power of light emitted from the surface emitting laser through a laser window.