Array of optical integrated devices with micro-lenses마이크로 렌즈를 가진 광학 집적 장치 어레이
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kwon, Young-Se | ko |
| dc.contributor.author | Yang, O-Seung | ko |
| dc.date.accessioned | 2022-12-12T07:03:28Z | - |
| dc.date.available | 2022-12-12T07:03:28Z | - |
| dc.identifier.uri | http://hdl.handle.net/10203/302813 | - |
| dc.description.abstract | An optical integrated device having an even height such that it can be easily arrayed or integrated with other devices in a single substrate. The device includes a semi-conductor substrate having a substrate-side electrode which is formed on one side of the semi-conductor substrate. A micro-lens layer is epitaxially grown on the opposite side to where the substrate-side electrode is formed. The opposite side also has a hemispherically etched surface. The device also includes epitaxial layers which are grown on a whole area on the micro lens layer and a dielectric film which is formed on the epitaxial layers. Additionally, an epilayer-side electrode is formed on a whole area of the dielectric film. | - |
| dc.title | Array of optical integrated devices with micro-lenses | - |
| dc.title.alternative | 마이크로 렌즈를 가진 광학 집적 장치 어레이 | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | Kwon, Young-Se | - |
| dc.contributor.nonIdAuthor | Yang, O-Seung | - |
| dc.contributor.assignee | KAIST | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 08582162 | - |
| dc.identifier.patentRegistrationNumber | 05898191 | - |
| dc.date.application | 1996-01-02 | - |
| dc.date.registration | 1999-04-27 | - |
| dc.publisher.country | US | - |
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