DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Taehyung | ko |
dc.contributor.author | Kim, Hyeongook | ko |
dc.contributor.author | Lee, Tae-Eog | ko |
dc.contributor.author | Morrison, James Robert | ko |
dc.contributor.author | Kim, Eungjin | ko |
dc.date.accessioned | 2022-08-24T07:00:42Z | - |
dc.date.available | 2022-08-24T07:00:42Z | - |
dc.date.created | 2022-06-08 | - |
dc.date.issued | 2021-12-12 | - |
dc.identifier.citation | 2021 Winter Simulation Conference (WSC) | - |
dc.identifier.issn | 0891=7736 | - |
dc.identifier.uri | http://hdl.handle.net/10203/298071 | - |
dc.description.abstract | Production scheduling of semiconductor manufacturing tools is a challenging problem due to the complexity of the equipment and systems in modern wafer fabs. In our study, we focus on the photolithography toolset and consider it as a non-identical parallel machine scheduling problem with random lot arrivals and auxiliary resource constraints. The proposed methodology strives to learn a near optimal scheduling policy by incorporating WIP, masks, and the tardiness of jobs. An Action Filter (AF) is proposed as a methodology to eliminate illogical actions and speed the learning process of agents. The proposed model was evaluated in a simulation environment inspired by practical photolithography scheduling problems across various settings with reticle and qualification constraints. Our experiments demonstrated improved performance compared to typical rule-based strategies. Relative to our learning methods, weighted shortest processing time (WSPT) and apparent tardiness cost with setups (ATCS) rules perform 28% and 32% worse for weighted tardiness, respectively. | - |
dc.language | English | - |
dc.publisher | IEEE | - |
dc.title | On Scheduling a Photolithograhy Toolset Based on a Deep Reinforcement Learning Approach with Action Filter | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-85126095083 | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 2021 Winter Simulation Conference (WSC) | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | Phoenix, AZ, USA | - |
dc.identifier.doi | 10.1109/wsc52266.2021.9715450 | - |
dc.contributor.localauthor | Lee, Tae-Eog | - |
dc.contributor.nonIdAuthor | Morrison, James Robert | - |
dc.contributor.nonIdAuthor | Kim, Eungjin | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.