DC Field | Value | Language |
---|---|---|
dc.contributor.author | Sim, Jee Hoon | ko |
dc.contributor.author | Chae, Hyeonwook | ko |
dc.contributor.author | Kim, Su-Bon | ko |
dc.contributor.author | Yoo, Seunghyup | ko |
dc.date.accessioned | 2022-06-27T07:01:17Z | - |
dc.date.available | 2022-06-27T07:01:17Z | - |
dc.date.created | 2022-06-27 | - |
dc.date.created | 2022-06-27 | - |
dc.date.created | 2022-06-27 | - |
dc.date.created | 2022-06-27 | - |
dc.date.created | 2022-06-27 | - |
dc.date.issued | 2022-06 | - |
dc.identifier.citation | SCIENTIFIC REPORTS, v.12, no.1 | - |
dc.identifier.issn | 2045-2322 | - |
dc.identifier.uri | http://hdl.handle.net/10203/297089 | - |
dc.description.abstract | We propose two novel methods to effectively utilize parylene C films. First, we demonstrate a vertical deposition method capable of depositing a parylene C film of the same thickness on both sides of a sample. Through this method, we have formed parylene C films with a thickness of 4 mu m on both sides of the sample with a thickness deviation of less than 2.5%. Further optical verification indicates that parylene C films formed by this method have a very uniform thickness distribution on each side of the surfaces. Second, we propose a debris-tolerant laser patterning method as a mask-less means to fabricate self-supporting ultrathin parylene C films. This method does not involve any photolithography and entails a simple and rapid process that can be performed using only a few materials with excellent biocompatibility. It is demonstrated that patterned parylene C films exhibit a high degree of surface uniformity and have various geometrical shapes so that they can be used for substrates of highly flexible and/or stretchable devices. Finally, we use both of the proposed methods to fabricate flexible, stretchable, and waterproof-packaged bifacial blue LED modules to illustrate their potential in emerging applications that would benefit from such versatile form factors. | - |
dc.language | English | - |
dc.publisher | NATURE PORTFOLIO | - |
dc.title | Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning | - |
dc.type | Article | - |
dc.identifier.wosid | 000810147600061 | - |
dc.identifier.scopusid | 2-s2.0-85131705099 | - |
dc.type.rims | ART | - |
dc.citation.volume | 12 | - |
dc.citation.issue | 1 | - |
dc.citation.publicationname | SCIENTIFIC REPORTS | - |
dc.identifier.doi | 10.1038/s41598-022-13080-w | - |
dc.contributor.localauthor | Yoo, Seunghyup | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | THIN | - |
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