DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Yuk, Jong Min | - |
dc.contributor.advisor | 육종민 | - |
dc.contributor.author | Koo, Kunmo | - |
dc.date.accessioned | 2022-04-21T19:33:10Z | - |
dc.date.available | 2022-04-21T19:33:10Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=964773&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/295525 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2020.8,[x, 153 p. :] | - |
dc.description.abstract | In situ liquid electron microscopy enables the real time visualization of reaction in nature. Unfortunately, the dominance in high spatial resolution of transmission electron microscopy (TEM) is distracted by the limitation of electron dose and scatter from thick specimen. Herein this dissertation, weak point of current liquid electron microscopy is studied to break through the innate limit. In specific, to increase the electron dose limit at the vulnerable liquid containing subject, radical scavenging property of graphene at liquid cell is studied. It is proven that target sustains functionality at least of 100-fold higher electron dose compared to the inert silicon nitride based liquid cells at the graphene encapsulated liquid cells. Further, from the calculation, liquid-flowing graphene-cell (LFGC) having optimal liquid thickness of 100 nm for atomic resolution image is implemented with MEMS fabrication techniques. Fabricated device is capable of imaging dynamic particles at 1.47 Å of spatial reactions. Also, the new concept of operando heating electron microscopy platform for high-resolution imaging of etching narrow silicon pattern is designed and more potential application is suggested. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | MEMS▼agraphene liquid cell▼aoperando transmission electron microscopy▼alive imaging▼ain situ | - |
dc.subject | 초소형정밀기계기술(MEMS)▼a그래핀 액상 셀▼a오페란도 전자현미경▼a실시간 이미징▼a인 시츄 | - |
dc.title | Development of operando electron microscopy platform for high-resolution imaging | - |
dc.title.alternative | 고분해능 이미징을 위한 오페란도 전자현미경 플랫폼 개발 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :신소재공학과, | - |
dc.contributor.alternativeauthor | 구건모 | - |
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