Development of operando electron microscopy platform for high-resolution imaging

Abstract

In situ liquid electron microscopy enables the real time visualization of reaction in nature. Unfortunately, the dominance in high spatial resolution of transmission electron microscopy (TEM) is distracted by the limitation of electron dose and scatter from thick specimen. Herein this dissertation, weak point of current liquid electron microscopy is studied to break through the innate limit. In specific, to increase the electron dose limit at the vulnerable liquid containing subject, radical scavenging property of graphene at liquid cell is studied. It is proven that target sustains functionality at least of 100-fold higher electron dose compared to the inert silicon nitride based liquid cells at the graphene encapsulated liquid cells. Further, from the calculation, liquid-flowing graphene-cell (LFGC) having optimal liquid thickness of 100 nm for atomic resolution image is implemented with MEMS fabrication techniques. Fabricated device is capable of imaging dynamic particles at 1.47 Å of spatial reactions. Also, the new concept of operando heating electron microscopy platform for high-resolution imaging of etching narrow silicon pattern is designed and more potential application is suggested.