Orientation control of organic supramolecular columns by high resolution guiding patterns고해상도 패턴을 이용한 유기 초분자 기둥 구조의 방향 제어에 관한 연구

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In this study, we investigate the orientation control of the organic supramolecular columns, which form the hexagonally aligned cylindrical nanostructures with 4.75 nm diameter, using high resolution guiding patterns. By the bottom-up lithography based on block copolymers, the guiding patterns were fabricated with small pattern width (< 50 nm), which is much smaller than that of conventional guiding patterns fabricated by top-down lithography (> 1000 nm). Characterized by atomic force microscopy (AFM), we confirm that high resolution guiding patterns can control the orientation of the supramolecular columns into parallel or perpendicular to the pattern axis by the variation of the film thickness. Due to strong guiding effect from high resolution patterns, the alignment in the curved patterns exhibited improved bending morphology relative to that of previous work. In combination with the directed self-assembly of block copolymers, these high resolution guiding patterns are expected to be the method for unidirectional nanopatterns over a large area, nanostructures formation with complex geometries for various applications, and orientation control with long-range lateral order above the patterned area.
Advisors
Jung, Hee-Taeresearcher정희태researcher
Description
한국과학기술원 :생명화학공학과,
Publisher
한국과학기술원
Issue Date
2021
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2021.2,[ii, 22 p. :]

Keywords

Nanostructure▼aSupramolecular dendrimer▼aDirected self-assembly▼aGraphoepitaxy▼aBlock copolymer lithography; 나노구조체▼a덴드리머 초분자체▼a유도 자기조립▼a그래포에피탁시▼a블록 공중합체 리소그래피

URI
http://hdl.handle.net/10203/295400
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=957330&flag=dissertation
Appears in Collection
CBE-Theses_Master(석사논문)
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