Optical MEMS devices for compact 3D surface imaging cameras

Abstract

Implementing 3D surface imaging camera systems into miniaturized devices for a variety of 3D applications such as movement recognition, object sensing, and 3D endoscopy has received great attention over the past decade. Recently, various MEMS techniques enabled the fabrication of key optical elements for 3D surface imaging with compact size, reasonable cost, and high yield. This article will overview the principles of major categories of 3D surface imaging techniques and their applications using optical MEMS devices for compact 3D surface imaging camera.