Inverse method to determine mechanical properties of thin film by nanoindentation and finite element analysis

Abstract

As a reliable tool to measure the Youngs modulus, nanoindention technique has been used widely recently. In this paper, nanoindetation technique was overviewed with its advantage and limitation and a new method was proposed to determine material properties of film, i.e. both Youngs modulus E and Poissons ratio v from load-displacement curve of shallow-depth indentation using inverse method.