METHOD FOR MANUFACTURING TRANSITION METAL CHALCOGENIDE AND TRANSITION METAL CHALCOGENIDE PREPARED THEREBY전이금속 칼코게나이드 제조방법 및 이에 의하여 제조된 전이금속 칼코게나이드
The present disclosure provides a method for preparing a transition metal chalcogenide including: a step of forming a transition metal chalcogenide thin film; and a step of controlling the defects of the transition metal chalcogenide thin film by injecting a processing gas including oxygen and nitrogen to the formed transition metal chalcogenide thin film.
- Assignee
- KAIST
- Country
- US (United States)
- Application Date
- 2020-07-10
- Application Number
- 16925674
- Registration Date
- 2022-03-08
- Registration Number
- 11268210
- Appears in Collection
- EE-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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