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MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

Le, Hoa Thanh; Haque, Rubaiyet I.; Ouyang, Ziwei; Lee, Seung Woo; Fried, Shelley I.; Zhao, Ding; Qiu, Min; et al, MICROSYSTEMS & NANOENGINEERING, v.7, no.1, 2021-08

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