Electrothermally Actuator with Large-area, Flat, and Ultrethin Silicon Nitride Membrane
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안명수 | ko |
| dc.contributor.author | 정기훈 | ko |
| dc.contributor.author | 전재훈 | ko |
| dc.contributor.author | 장경원 | ko |
| dc.date.accessioned | 2022-01-05T06:47:31Z | - |
| dc.date.available | 2022-01-05T06:47:31Z | - |
| dc.date.created | 2021-12-29 | - |
| dc.date.created | 2021-12-29 | - |
| dc.date.issued | 2021-04-08 | - |
| dc.identifier.citation | 제23회 KMEMS 학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/291598 | - |
| dc.language | Korean | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.title | Electrothermally Actuator with Large-area, Flat, and Ultrethin Silicon Nitride Membrane | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 제23회 KMEMS 학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 부여 롯데리조트 | - |
| dc.contributor.localauthor | 정기훈 | - |
| dc.contributor.nonIdAuthor | 전재훈 | - |
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