Electrothermal MEMS Grating for Micro-spectrometer Application
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전재훈 | ko |
| dc.contributor.author | 정기훈 | ko |
| dc.contributor.author | 안명수 | ko |
| dc.contributor.author | 박정우 | ko |
| dc.contributor.author | 김기범 | ko |
| dc.date.accessioned | 2022-01-04T06:44:24Z | - |
| dc.date.available | 2022-01-04T06:44:24Z | - |
| dc.date.created | 2021-12-29 | - |
| dc.date.created | 2021-12-29 | - |
| dc.date.issued | 2021-11-11 | - |
| dc.identifier.citation | 2021 마이크로나노시스템학회 추계학술대회(MNS 2021) | - |
| dc.identifier.uri | http://hdl.handle.net/10203/291496 | - |
| dc.language | Korean | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.title | Electrothermal MEMS Grating for Micro-spectrometer Application | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2021 마이크로나노시스템학회 추계학술대회(MNS 2021) | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 온라인 | - |
| dc.contributor.localauthor | 정기훈 | - |
| dc.contributor.nonIdAuthor | 전재훈 | - |
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