양극산화알루미늄 기판을 이용한 저전력 마이크로 히터 플랫폼 기반 가스센서 설계

Abstract

Demands for detecting and monitoring hazardous, toxic, and flammable gases are increasing in both of industrial and domestic environments. Among various types of gas sensor, the semiconductor gas sensors are promising candidate for gas monitoring platforms due to high performance and low cost. The semiconductor gas sensors use conductometric change by redox reaction between oxygen ions and target gases, which requires high temperature. Microheater platforms have been researched to get high performance semiconductor gas sensors. In this research, anodic aluminum oxide based microheater is designed for low power consumption platform. Due to nanoscale air pores, anodic aluminum oxide has low heat conductivity and high thermal efficiency. Temperature of suggested microheater was elevated to a 456℃ with a 32.6mW power consumption. The possibility of anodic aluminum oxide template for gas detection was successfully analyzed.