Effects of Al Precursors on the Characteristics of Indium-Aluminum Oxide Semiconductor Grown by Plasma-Enhanced Atomic Layer Deposition

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Atomic layer deposition (ALD) has attracted much attention, particularly for applications in nanoelectronics because of its atomic-level controllability and high-quality products. In this study, we developed a plasma-enhanced atomic layer deposition (PEALD) process to fabricate a homogeneous indium aluminum oxide (IAO) semiconductor film. Trimethylaluminum (TMA) and dimethylaluminum isopropoxide (DMAI) were used as Al precursors, which yielded different compositions. Density functional theory (DFT) calculations on the surface reactions between indium and aluminum precursors showed that while highly reactive TMA would etch In, DMAI with lower reactivity would allow indium to persist in the films, resulting in a more controlled doping of Al. The In/Al composition ratio could be further precisely controlled by adjusting the indium precursor dose time to sub-saturation. IAO based on DMAI was applied to fabricate thin-film transistors (TFTs), showing that Al can be a carrier suppressor of indium oxide. TFTs with PEALD IAO containing 3.8 atomic % Al showed a turn-on voltage of -0.4 +/- 0.3 V, a subthreshold slope of 0.09 V/decade, and a field effect mobility of 18.9 cm(2)/(V s).
Publisher
AMER CHEMICAL SOC
Issue Date
2021-08
Language
English
Article Type
Article
Citation

ACS APPLIED MATERIALS & INTERFACES, v.13, no.33, pp.40134 - 40144

ISSN
1944-8244
DOI
10.1021/acsami.1c11304
URI
http://hdl.handle.net/10203/287910
Appears in Collection
MS-Journal Papers(저널논문)
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