DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ryu, Hyun Jun | ko |
dc.contributor.author | Kim, Dong Geun | ko |
dc.contributor.author | Kang, Sukkyung | ko |
dc.contributor.author | Jeong, Ji-hun | ko |
dc.contributor.author | Kim, Sanha | ko |
dc.date.accessioned | 2021-07-30T05:30:07Z | - |
dc.date.available | 2021-07-30T05:30:07Z | - |
dc.date.created | 2021-07-10 | - |
dc.date.created | 2021-07-10 | - |
dc.date.issued | 2021-07 | - |
dc.identifier.citation | CIRP ANNALS-MANUFACTURING TECHNOLOGY, v.70, no.1, pp.273 - 276 | - |
dc.identifier.issn | 0007-8506 | - |
dc.identifier.uri | http://hdl.handle.net/10203/286948 | - |
dc.description.abstract | Pad asperities in chemical-mechanical polishing (CMP) provide necessary forces for mechanical abrasion. This article investigates the abrasive behaviour of polishing pads at the asperity contact scale. A contact mechanics model predicts that compliant and soft asperities or rigid and hard asperities may solely achieve either large contact area or high indentation depth respectively, whereas bi-layered asperities can enable both the enlarged contact and deep abrasion. Hemispherical pad micro-asperities with precise dimensions, including the new bi-layered design, were fabricated using thermal reflow and micro-replica molding techniques and their polishing behaviours were experimentally compared using a pin-on-disk polishing setup. (c) 2021 CIRP. Published by Elsevier Ltd. All rights reserved. | - |
dc.language | English | - |
dc.publisher | Elsevier BV | - |
dc.title | Mechanical Abrasion by Bi-layered Pad Micro-Asperity in Chemical Mechanical Polishing | - |
dc.type | Article | - |
dc.identifier.wosid | 000672153000015 | - |
dc.identifier.scopusid | 2-s2.0-85107703108 | - |
dc.type.rims | ART | - |
dc.citation.volume | 70 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 273 | - |
dc.citation.endingpage | 276 | - |
dc.citation.publicationname | CIRP ANNALS-MANUFACTURING TECHNOLOGY | - |
dc.identifier.doi | 10.1016/j.cirp.2021.04.012 | - |
dc.contributor.localauthor | Kim, Sanha | - |
dc.contributor.nonIdAuthor | Kim, Dong Geun | - |
dc.contributor.nonIdAuthor | Kang, Sukkyung | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Abrasion | - |
dc.subject.keywordAuthor | Polishing | - |
dc.subject.keywordAuthor | Material Removal | - |
dc.subject.keywordPlus | MATERIAL REMOVAL | - |
dc.subject.keywordPlus | MODEL | - |
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