DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shim, Joonsup | ko |
dc.contributor.author | Lim, Jinha | ko |
dc.contributor.author | Geum, Dae-Myeong | ko |
dc.contributor.author | Kim, Bong Ho | ko |
dc.contributor.author | Ahn, Seung-Yeop | ko |
dc.contributor.author | Kim, SangHyeon | ko |
dc.date.accessioned | 2021-07-06T02:50:21Z | - |
dc.date.available | 2021-07-06T02:50:21Z | - |
dc.date.created | 2021-07-05 | - |
dc.date.created | 2021-07-05 | - |
dc.date.created | 2021-07-05 | - |
dc.date.issued | 2021-06 | - |
dc.identifier.citation | OPTICS EXPRESS, v.29, no.12, pp.18037 - 18058 | - |
dc.identifier.issn | 1094-4087 | - |
dc.identifier.uri | http://hdl.handle.net/10203/286417 | - |
dc.description.abstract | In this paper, we systematically investigated tailoring bolometric properties of a proposed heat-sensitive TiOx/Ti/TiOx tri-layer film for a waveguide-based bolometer, which can play a significant role as an on-chip detector operating in the mid-infrared wavelength range for the integrated optical gas sensors on Ge-on-insulator (Ge-OI) platform. As a proof-of-concept, bolometric test devices with a TiOx single-layer and TiOx/Ti/TiOx tri-layer films were fabricated by varying the layer thickness and thermal treatment condition. Comprehensive characterization was examined by the scanning transmission electron microscopy (STEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS) analyses in the prepared films to fully understand the microstructure and interfacial properties and the effects of thermal treatment. Quantitative measurements of the temperature- and time-dependent resistance variations were conducted to deduce the minimum detectable change in temperature (Delta T-min) of the prepared films. Furthermore, based on these experimentally obtained results, limit-of-detection (LoD) for the carbon dioxide gas sensing was estimated to demonstrate the feasibility of the proposed waveguide-based bolometer with the TiOx/Ti/TiOx tri-layer film as an on-chip detector on the Ge-OI platform. It was found that the LoD can reach similar to 3.25 ppm and/or even lower with the Delta T-min of 11.64 mK in the device with the TiOx/Ti/TiOx (47/6/47 nm) tri-layer film vacuum-annealed at 400 degrees C for 15 min, which shows great enhancement of similar to 7.7 times lower value compared to the best case of TiOx single-layer films. Our theoretical and experimental demonstration for tailoring bolometric properties of a TiOx/Ti/TiOx tri-layer film provides fairly useful insight on how to improve LoD in the integrated optical gas sensor with the bolometer as an on-chip detector. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.title | Tailoring bolometric properties of a TiOx/Ti/TiOx tri-layer film for integrated optical gas sensors | - |
dc.type | Article | - |
dc.identifier.wosid | 000659223100027 | - |
dc.identifier.scopusid | 2-s2.0-85106553465 | - |
dc.type.rims | ART | - |
dc.citation.volume | 29 | - |
dc.citation.issue | 12 | - |
dc.citation.beginningpage | 18037 | - |
dc.citation.endingpage | 18058 | - |
dc.citation.publicationname | OPTICS EXPRESS | - |
dc.identifier.doi | 10.1364/OE.427147 | - |
dc.contributor.localauthor | Kim, SangHyeon | - |
dc.contributor.nonIdAuthor | Geum, Dae-Myeong | - |
dc.description.isOpenAccess | Y | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | WAVE-GUIDE PLATFORM | - |
dc.subject.keywordPlus | MIDINFRARED PHOTONICS | - |
dc.subject.keywordPlus | ROOM-TEMPERATURE | - |
dc.subject.keywordPlus | THIN-FILM | - |
dc.subject.keywordPlus | MU-M | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | GERMANIUM | - |
dc.subject.keywordPlus | MICROBOLOMETER | - |
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