32 x 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry

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dc.contributor.authorHan, Sangyoonko
dc.contributor.authorBeguelin, Jeremyko
dc.contributor.authorOchikubo, Laneko
dc.contributor.authorJacobs, Johnko
dc.contributor.authorSeok, Tae J.ko
dc.contributor.authorYu, Kyoungsikko
dc.contributor.authorQuack, Nielsko
dc.contributor.authorKim, Chang-Kyuko
dc.contributor.authorMuller, Richard S.ko
dc.contributor.authorWu, Ming C.ko
dc.date.accessioned2021-06-14T06:50:48Z-
dc.date.available2021-06-14T06:50:48Z-
dc.date.created2021-06-14-
dc.date.created2021-06-14-
dc.date.created2021-06-14-
dc.date.created2021-06-14-
dc.date.issued2021-04-
dc.identifier.citationJOURNAL OF OPTICAL MICROSYSTEMS, v.1, no.2-
dc.identifier.issn2708-5260-
dc.identifier.urihttp://hdl.handle.net/10203/285861-
dc.description.abstractWe report on a 32 x 32 silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The switch is fabricated on 200-mm silicon-on-insulator wafers in a commercial complementary metal-oxide-semiconductor (CMOS) foundry. The fabricated device has a maximum on-chip loss of 7.7 dB and an extinction ratio of 50.8 dB. The switching voltage is 9.45 Vand the 20-dB bandwidth is 28.7 nm. Our work shows a promising path for mass production of silicon photonic MEMS switches in commercial CMOS foundries. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License.-
dc.languageEnglish-
dc.publisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS-
dc.title32 x 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume1-
dc.citation.issue2-
dc.citation.publicationnameJOURNAL OF OPTICAL MICROSYSTEMS-
dc.identifier.doi10.1117/1.JOM.1.2.024003-
dc.contributor.localauthorYu, Kyoungsik-
dc.contributor.nonIdAuthorHan, Sangyoon-
dc.contributor.nonIdAuthorBeguelin, Jeremy-
dc.contributor.nonIdAuthorOchikubo, Lane-
dc.contributor.nonIdAuthorJacobs, John-
dc.contributor.nonIdAuthorSeok, Tae J.-
dc.contributor.nonIdAuthorQuack, Niels-
dc.contributor.nonIdAuthorKim, Chang-Kyu-
dc.contributor.nonIdAuthorMuller, Richard S.-
dc.contributor.nonIdAuthorWu, Ming C.-
dc.description.isOpenAccessY-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorsilicon photonics-
dc.subject.keywordAuthormicro-electro-mechanical-system-
dc.subject.keywordAuthorswitch-
dc.subject.keywordAuthorfoundry-
dc.subject.keywordAuthordirectional coupler-
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