DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Jung, Hee-Tae | - |
dc.contributor.advisor | 정희태 | - |
dc.contributor.author | Joo, Heeeun | - |
dc.date.accessioned | 2021-05-13T19:40:15Z | - |
dc.date.available | 2021-05-13T19:40:15Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=925271&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/285107 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2020.8,[ii, 24 p :] | - |
dc.description.abstract | Hydrogen sulfide($H_2S$) is a highly toxic gas that paralyzes the olfactory nerves, but it occurs in many industries. Therefore, it is important to detect the $H_2S$ gas from ppb to ppm level for industrial and safety applications. In this study, the high-resolution $SnO_2$ nanopattern with ultra-small grain size (<15 nm) and high aspect ratio (>20) was made by our unique top-down lithography technique. This $SnO_2$ nanopattern exhibited remarkable sensitivity from 50 ppb to 50 ppm ($R_a/R_g$=116.62, $\tau_{res}$ = 31 s at 0.5 ppm) along with excellent selectivity. Also, without additional processing, this lithography could add any dopants to nanostructure, inducing sensitization effect. Especially, the sensitivity of $H_2S$ was enhanced in NiO-$SnO_2$ ($R_a/R_g$ = 166.2, $\tau_{res}$ = 21 s at 0.5 ppm) due to p-n heterojunction. In addition, the sensitivity of 5 ppm $NO_2$ was improved in NiO-$SnO_2$ ($R_g/R_a$=190.59) compared to $SnO_2$ ($R_g/R_a$=8.72), shown as a dual switching material applicable to both $H_2S$ and $NO_2$ gases. Therefore, this study was able to control the materials involved in the sensitivity and selectivity of the sensor, and confirmed the commercialization potential of the sensor of high-resolution nanopatterns through unique top-down lithography. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Secondary Sputtering Lithography▼aGas sensor▼aHydrogen sulfide▼aMetal oxide▼ap-n heterojunction | - |
dc.subject | 이차 스퍼터링 리소그래피▼a가스 센서▼a황화수소▼a금속 산화물▼ap-n 이종 접합 | - |
dc.title | High-resolution tin oxide nanopattern structure control for ultra-sensitive hydrogen sulfide gas sensor | - |
dc.title.alternative | 고분해능 주석 산화물의 나노 구조 제어를 통한 고민감도 황화수소 가스 센서 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :생명화학공학과, | - |
dc.contributor.alternativeauthor | 주희은 | - |
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