DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Lee, Chang-Ock | - |
dc.contributor.advisor | 이창옥 | - |
dc.contributor.author | Jeong, Seong Jin | - |
dc.date.accessioned | 2021-05-13T19:34:57Z | - |
dc.date.available | 2021-05-13T19:34:57Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=911440&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/284810 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 수리과학과, 2020.2,[ii, 15 p. :] | - |
dc.description.abstract | Defect detection in semiconductor wafers is an important step in the semiconductor manufacturing process. Since manual defect detection takes much time and is less accurate, various image processing techniques for defect detection have been developed. In this thesis, we implement two defect detection methods. The first method is based on wavelet transform. It calculates the wavelet transform modulus sum (WTMS) for suspicious pixels for detection. The second method is based on self-similarity. The method generates a residual image from a source image by self-similarity based background subtraction, and defects are determined through a statistical method. We apply these methods to several test images and discuss their pros and cons. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Defect Detection▼aSemiconductor Wafer▼aWavelet Transform▼aSelf-similarity▼aImage Processing | - |
dc.subject | 결함 탐지▼a반도체 웨이퍼▼a웨이블릿 변환▼a자기 유사성▼a영상처리 | - |
dc.title | Defect detection on semiconductor wafers using image processing techniques | - |
dc.title.alternative | 이미지 기술을 이용한 반도체 웨이퍼의 결함 검사 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :수리과학과, | - |
dc.contributor.alternativeauthor | 정성진 | - |
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