Graphene based electrochemical chip fabrication for high resolution in-situ battery TEM

Abstract

Although electric vehicle and energy storage system attract attention, the development of next generation bat-tery for them has not been successful. To develop the new generation battery, the precise analysis method is needed to fully understand operation mechanism of batteries. In this work, we improved the conventional electrochemical chip, which enable operando-TEM study of batteries, by changing a transmission window as graphene to get higher resolution. We synthesized the graphene for the transmission window, fabricated the fram-ework of electrochemical chip using the Si wafer process, and got TEM image of sulfur particle with this chip. The result showed that our electrochemical chip reduce e-beam damage to sulfur particle, and enhance resolution of TEM. Consequently, we expect that the deeper investigation of battery mechanism will be possi-ble with our graphene based electrochemical chip.