(The) high precision and fast actuation system for large aperture mirror using magnetic levitation technology

Abstract

The high precision and fast actuation system for large aperture mirror using magnetic levitation technology is proposed in this dissertation. High precision laser beam steering technology is used in various fields for purposes such as aerospace engineering, long-distance communication and data transfer engineering, and military defense. Optical mirror actuation system plays an important role in the laser beam steering technology. The proposed mirror actuation system is actuated by VCM for large motion range. For the high quality laser beam, mirror mounting system is composed of flexure mechanism. Compact structure is designed to be control easily. VCM can be designed for maximum force within limited size. Analytical modeling of magnetic flux density is introduced to design optimally. Optimal design of VCM is conducted based on the analytical modeling. Mirror mounting system using flexure mechanism is proposed and designed. In order to design optimally, analytical modeling of flexure mechanism is introduced. Optimal design is conducted based on the analytical modeling. The proposed mirror actuation system is finally designed with optimized mirror mounting system and optimized actuators. The proposed mirror actuation system is fabricated by using optimal design results. The realized system with three parts of mirror actuation system is presented. The electric devices and the controller for experiment are selected with each purpose. The target performances of the mirror actuation system are evaluated by experiments.