DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, JY | ko |
dc.contributor.author | Choi, HJ | ko |
dc.contributor.author | Lee, Y | ko |
dc.contributor.author | Kang, S | ko |
dc.contributor.author | Chun, K | ko |
dc.contributor.author | Park, SW | ko |
dc.contributor.author | Kuk, Y | ko |
dc.date.accessioned | 2021-03-16T01:30:10Z | - |
dc.date.available | 2021-03-16T01:30:10Z | - |
dc.date.created | 2020-12-27 | - |
dc.date.issued | 1996-09 | - |
dc.identifier.citation | Journal de Physique. IV : JP, v.6, no.C5, pp.285 - 289 | - |
dc.identifier.issn | 1155-4339 | - |
dc.identifier.uri | http://hdl.handle.net/10203/281557 | - |
dc.description.abstract | We constructed a scanning tunneling microscope aligned field emission (SAFE) source by using silicon micro-fabricated electrostatic lenses. The system consists of an STM aligned field emitter, 5 mu m extractor, 100 mu m accelerator, beam dump, quadrupole deflector and einzel lens. The microlenses were made by using silicon processing techniques. The system can be operated from 200 to 2 kV, resulting in a beam current of tens of nA and with the diameter of similar to 0.1 mu m when a sample was placed less than 2 mm away from the exiting einzel lens. In order to measure the spherical and chromatic aberrations, a detector and cylindrical electron energy analyzer were attached to the micro-column. | - |
dc.language | English | - |
dc.publisher | Les Editions de physique | - |
dc.title | Construction of STM aligned electron field emission source | - |
dc.type | Article | - |
dc.identifier.wosid | A1996WF80000049 | - |
dc.identifier.scopusid | 2-s2.0-0030234935 | - |
dc.type.rims | ART | - |
dc.citation.volume | 6 | - |
dc.citation.issue | C5 | - |
dc.citation.beginningpage | 285 | - |
dc.citation.endingpage | 289 | - |
dc.citation.publicationname | Journal de Physique. IV : JP | - |
dc.identifier.doi | 10.1051/jp4:1996546 | - |
dc.contributor.localauthor | Park, JY | - |
dc.contributor.nonIdAuthor | Choi, HJ | - |
dc.contributor.nonIdAuthor | Lee, Y | - |
dc.contributor.nonIdAuthor | Kang, S | - |
dc.contributor.nonIdAuthor | Chun, K | - |
dc.contributor.nonIdAuthor | Park, SW | - |
dc.contributor.nonIdAuthor | Kuk, Y | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordPlus | MICROCOLUMN | - |
dc.subject.keywordPlus | SYSTEM | - |
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