DC Field | Value | Language |
---|---|---|
dc.contributor.author | Fallahazad, B. | ko |
dc.contributor.author | Lee, K. | ko |
dc.contributor.author | Lian, G. | ko |
dc.contributor.author | Kim, S. | ko |
dc.contributor.author | Corbet, C. M. | ko |
dc.contributor.author | Ferrer, D. A. | ko |
dc.contributor.author | Colombo, L. | ko |
dc.contributor.author | Tutuc, E. | ko |
dc.date.accessioned | 2021-02-17T07:50:27Z | - |
dc.date.available | 2021-02-17T07:50:27Z | - |
dc.date.created | 2021-02-17 | - |
dc.date.issued | 2012-02 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.100, no.9 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/280821 | - |
dc.description.abstract | We investigate the scaling of Al2O3 dielectric on graphene by atomic layer deposition (ALD) using ultra-thin, oxidized Ti and Al films as nucleation layers. We show that the nucleation layer significantly impacts the dielectric constant (k) and morphology of the ALD Al2O3, yielding k = 5.5 and k = 12.7 for Al and Ti nucleation layers, respectively. Transmission electron microscopy shows that Al2O3 grown using the Ti interface is partially crystalline, while Al2O3 grown on Al is amorphous. Using a spatially uniform 0.6 nm-thick Ti nucleation layer, we demonstrate graphene field-effect transistors with top dielectric stacks as thin as 2.6 nm. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3689785] | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Scaling of Al2O3 dielectric for graphene field-effect transistors | - |
dc.type | Article | - |
dc.identifier.wosid | 000301504800059 | - |
dc.identifier.scopusid | 2-s2.0-84863292577 | - |
dc.type.rims | ART | - |
dc.citation.volume | 100 | - |
dc.citation.issue | 9 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.3689785 | - |
dc.contributor.localauthor | Lee, K. | - |
dc.contributor.nonIdAuthor | Fallahazad, B. | - |
dc.contributor.nonIdAuthor | Lian, G. | - |
dc.contributor.nonIdAuthor | Kim, S. | - |
dc.contributor.nonIdAuthor | Corbet, C. M. | - |
dc.contributor.nonIdAuthor | Ferrer, D. A. | - |
dc.contributor.nonIdAuthor | Colombo, L. | - |
dc.contributor.nonIdAuthor | Tutuc, E. | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | aluminium compounds | - |
dc.subject.keywordAuthor | atomic layer deposition | - |
dc.subject.keywordAuthor | dielectric materials | - |
dc.subject.keywordAuthor | field effect transistors | - |
dc.subject.keywordAuthor | fullerene devices | - |
dc.subject.keywordAuthor | graphene | - |
dc.subject.keywordAuthor | nucleation | - |
dc.subject.keywordAuthor | permittivity | - |
dc.subject.keywordAuthor | transmission electron microscopy | - |
dc.subject.keywordAuthor | vacuum deposition | - |
dc.subject.keywordPlus | ATOMIC LAYER DEPOSITION | - |
dc.subject.keywordPlus | SURFACE-CHEMISTRY | - |
dc.subject.keywordPlus | OXIDATION | - |
dc.subject.keywordPlus | ALUMINUM | - |
dc.subject.keywordPlus | GROWTH | - |
dc.subject.keywordPlus | OXIDES | - |
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