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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

클리닝이 포함된 반도체 제조용 양팔 클러스터 장비에서의 웨이퍼 지연 감소를 위한 Kanban 피드백제어 Case study

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김재현 / 이태억researcher
Publisher
대한산업공학회
Issue Date
2019-11-08
Language
Korean
Citation

2019 대한산업공학회 추계학술대회, pp.3454

URI
http://hdl.handle.net/10203/280749
Appears in Collection
IE-Conference Papers(학술회의논문)
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