DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, Hohyung | ko |
dc.contributor.author | Cho, Soo-Yeon | ko |
dc.contributor.author | Ryu, Jin | ko |
dc.contributor.author | Choi, Junghoon | ko |
dc.contributor.author | Ahn, Hyunah | ko |
dc.contributor.author | Joo, Heeeun | ko |
dc.contributor.author | Jung, Hee-Tae | ko |
dc.date.accessioned | 2021-01-05T16:10:30Z | - |
dc.date.available | 2021-01-05T16:10:30Z | - |
dc.date.created | 2020-06-02 | - |
dc.date.issued | 2020-07 | - |
dc.identifier.citation | ADVANCED FUNCTIONAL MATERIALS, v.30, no.27, pp.2002486 | - |
dc.identifier.issn | 1616-301X | - |
dc.identifier.uri | http://hdl.handle.net/10203/279549 | - |
dc.description.abstract | An electronic nose (E-nose) is an artificial sensing device that mimics the human olfactory system using a multiarray sensor system. However, since the design and fabrication of multiarray sensing channels are significantly limited because of the requirement of time-consuming and nonuniversal processes, the development of commercializable and high-throughput fabrication approaches are critically required. Herein, high-resolution top-down lithography is developed for E-nose fabrication for the first time. Five different metal oxide semiconductor (MOS) nanopattern channels (NiO, CuO, Cr2O3, SnO2, and WO3) are fabricated into multiarray sensors with high-throughput using a unique lithographic approach that utilizes the sputtering of grains of the metals via low-energy ion plasma bombardment. The nanopattern channels show i) high-resolutions (15 nm scale), ii) high-aspect-ratios (11; 14 nm width and 150 nm height), and iii) ultrasmall grains (5.1 nm) with uniformity on a cm(2) scale, resulting in high sensitivity toward the target analytes. The E-nose system, which is composed of five MOS nanopattern channels, can successfully distinguish seven different hazardous analytes, including volatile organic compounds and nitrogen-containing compounds. It is expected that this unique lithography approach can provide a simple and reliable method for commercializable channel fabrication, and the E-noses can have further applications in real-life situations. | - |
dc.language | English | - |
dc.publisher | WILEY-V C H VERLAG GMBH | - |
dc.title | Multiarray Nanopattern Electronic Nose (E-Nose) by High-Resolution Top-Down Nanolithography | - |
dc.type | Article | - |
dc.identifier.wosid | 000533218200001 | - |
dc.identifier.scopusid | 2-s2.0-85084702398 | - |
dc.type.rims | ART | - |
dc.citation.volume | 30 | - |
dc.citation.issue | 27 | - |
dc.citation.beginningpage | 2002486 | - |
dc.citation.publicationname | ADVANCED FUNCTIONAL MATERIALS | - |
dc.identifier.doi | 10.1002/adfm.202002486 | - |
dc.contributor.localauthor | Jung, Hee-Tae | - |
dc.contributor.nonIdAuthor | Cho, Soo-Yeon | - |
dc.contributor.nonIdAuthor | Ryu, Jin | - |
dc.contributor.nonIdAuthor | Ahn, Hyunah | - |
dc.contributor.nonIdAuthor | Joo, Heeeun | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | electronic nose | - |
dc.subject.keywordAuthor | gas sensors | - |
dc.subject.keywordAuthor | multiarray | - |
dc.subject.keywordAuthor | nanolithography | - |
dc.subject.keywordAuthor | principal component analysis | - |
dc.subject.keywordPlus | WO3 NANOFIBERS | - |
dc.subject.keywordPlus | GAS SENSORS | - |
dc.subject.keywordPlus | THICK-FILMS | - |
dc.subject.keywordPlus | OXIDE | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | BIOMARKERS | - |
dc.subject.keywordPlus | PATTERN | - |
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